JSM-7800F

Incorporates 4 types of detectors:
1. Lower electron detector (LED).
2. Upper electron detector (UED)
3. Upper secondary electron detector (USD)
4. Backscattered electron detector (BED)

For the UED, the secondary electron and backscattered electron dose can be changed according to the filter voltage, making it possible to select the electron energy. The USD detects the low-energy electrons that bounce off the filter. With the BED, channeling contrast can be clearly observed by detecting the low-angle backscattered electrons. The LED enables acquisition of images with a 3-dimensional appearance, including the surface roughness information from the illumination effects.
https://people.utm.my/microscopy-lab/field-emission-scanning-electron-microscope-fesem/